EX100 Excimer Laser System

EX100 EXCIMER LASER

EX100/125 Air cooled laser

The EX100 excimer lasers are designed to provide high power industrial laser performance in a low cost, high reliability system. The unique linear design of GAM LASER products allows power scaling to be achieved at low incremental cost. The EX100 provides the first cost effective high power excimer laser. The EX100 gives repetition rates to 1000Hz with all excimer gases and F2 at 157nm, lower repetition rate versions are also available. The laser gives up to 68W output power with KrF and 32W with ArF. Exceptional dynamic and static gas lifetime is obtained from the total metal/ceramic design and corona preionization system with over 30 million pulses to 50% energy on KrF and 12 weeks static gas lifetime. An industrial version gives longer gas lifetime. The laser is a total metal/ceramic device and uses the most advanced design of any commercial excimer laser.

EX100 HIGH ENERGY EXCIMER LASER SPECIFICATIONS

PARAMETER	F2	ArF	KrF	XeCl	XeF
Wavelength nm	157	193	248	308	351
Energy Max. mJ	6	55	90	45	50
Average Power 125Hz	0.5	6	10	5	4
Average Power @250Hz	1.0	10	18	9	8
Average Power @500Hz	2.0	18	35	17	16
Dynamic gas lifetime Pulses to 50% energy	15E6	20E6	30E6	30E6	30E6
Shelf life Approx. to 50% energy	15 days	60 days	90 days	1 Year	90 Days
Pulse Length, ns	15-22
Beam Size, mm	9 X 4
Stability	<2% Standard Deviation
Tube Service	2 Billion Pulses
Divergence, mRad full angle	0.8 X 1.5
Cooling	Air/Water

Want more energy ? Try our new Improved EX200, giving up to 200mJ

Key Benefits

	A powerful high repetition rate system in a compact package.
	Low divergence output
	Excellent pulse to pulse stability

Applications

	Pulsed laser deposition
	Ionization
	Micromachining

Download EX100 data sheet in .pdf format

Download EX100 dimensionals in .pdf format

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EX100 Stability at 125Hz, 70mJ with KrF. Standard deviation 0.86% in 5000 pulses, Max./Min. 67.9mJ/74.1 mJ.

* Maximum energy is approximately 20% lower for 1kHz lasers