EX200 Laser System

THE NEW EX200 EXCIMER LASER

The EX200 is a high energy excimer laser producing up to 180mJ output energy at 248nm and 125mJ at 193nm. The laser is designed for applications requiring high pulse energy such as Pulsed Laser Deposition.

Download EX200 Data sheet .pdf format

Download Dimensional drawing

Why choose GAM EX200 for PLD ?. Click here

PARAMETER	F2	ArF	KrF	XeCl	XeF
Wavelength nm	157	193	248	308	351
Energy Max. mJ	10	125	180	100	90
Average Power @60Hz	0.6	6	10	5	4.5
Average Power @125Hz	1.0	11	18	10	9
Dynamic gas lifetime Pulses to 50% energy*	10E6	15E6	18E6	20E6	15E6
Shelf life Approx. to 50% energy	15 days	60 days	90 days	1 year	90 Days
Pulse Length	16-22 nS
Beam Size	11 X 6- 7 mm
Divergence	0.8 X 1.2 mRad
Stability	<2% Standard Deviation
Timing Jitter	+/- 2nS
Cooling	Air/ Water

Key Benefits

	High Energy in a single table top package
	Low divergence beam
	Computer controlled scientific instrument
	Low Jitter <2nS standard deviation