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INDUSTRIAL LASER PRODUCTS
Total Metal/Ceramic SUPERCHAMBER II Industrial lasers
feature additional technology to improve gas, optics and system lifetimes.
Including
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High speed laser blower |
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Soft gas discharge |
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Industrial grade electronic power modules |
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Generation II Corona preionization |
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Active gas clean up |
EX10IN INDUSTRIAL LASER SPECIFICATIONS
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PARAMETER |
ArF |
KrF |
XeCl |
XeF |
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Wavelength nm |
193 |
248 |
308 |
351 |
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Energy Max. mJ |
20 |
30 |
12 |
12 |
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Energy Control Range, mJ |
5-20 |
10-30 |
7-12 |
7-12 |
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Average power EX10IN/300 |
4.0 |
7.0 |
3.0 |
3.0 |
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Average power EX10IN/600 |
7.0 |
13.0 |
6.0 |
6.0 |
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Average Power EX10IN/750 |
9.0 |
18.0 |
8.0 |
8.0 |
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Repetition Rate Hz |
300/600/750
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Dynamic gas lifetime |
20E6 |
35E6 |
20E6 |
20E6 |
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Static Gas Life to 50% energy |
60 days |
90 days |
6 months |
90 days |
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Pulse Length,ns |
15 |
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Beam Size, mm |
8 X 3-4 |
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Divergence, mRad full angle |
1 X 2 |
| Stability |
<2%
Standard deviation |
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Cooling |
Air |
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Optics Service |
300-500 Million |
1 Billion |
100E6 |
500E6 |
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Tube Service |
> 3 Billion Pulses |
Dimensional drawings .pdf format
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