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EX50IN INDUSTRIAL LASER SPECIFICATIONS
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PARAMETER |
F2 |
ArF |
KrF |
XeCl |
XeF |
| Wavelength nm |
157 |
193 |
248 |
308 |
351 |
| Energy Max.
mJ |
2.5 |
35 |
50 |
20 |
20 |
| Average Power @250Hz |
0.5 |
5 |
10 |
5 |
5 |
| Average Power @500Hz |
1 |
10 |
20 |
9 |
9 |
| Average
Power @750Hz |
1.5 |
15 |
30 |
12 |
12 |
| Repetition
Rate, Hz |
250/500/750 |
| Dynamic gas lifetime to
50% energy |
40E6 |
300E6 |
500E6 |
100E6 |
150E6 |
| Shelf life
Approx. to 50% energy |
15 days |
90 days |
120 days |
>1 Year |
120 Days |
| Pulse Length,
ns |
10 |
15-20 |
| Beam Size, mm |
9
X 4 |
| Stability |
<2% Standard Deviation |
| Tube Service |
3
Billion Pulses |
| Divergence, mRad full angle |
0
.8 X 2 |
| Cooling |
Air/Water |
| Window Service |
500E6 |
500E6 |
>1 billion |
200E6 |
300E6 |
Dimensional drawings .pdf format
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