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An overview of laboratory excimer laser products
All excimer laser products are of
total/metal ceramic construction and use no elastomers or plastics. Corona
preionization is used on all systems to give long life, high stability
operation. 10 billion pulse
system components lifetime. Class 1000 clean room chamber
manufacturing. 500,000 hour MTBF
electronic power modules. Just plug these units in for long term,
reliable operation.
EX5
Excimer laser
The worlds most powerful mini excimer

The EX5 is a genuine low cost MINI excimer
laser in an ultra compact 47 X 25 X 25cm, 14kg package with up to 7.5W at 248nm
and 3.5W at 193nm. For applications in micromachining, laser ablation, laser
ionization and OEM products.
EX10
Excimer laser
The
EX10 mini laser (61 x 40 x 27 cm) is an ideal laser for general laboratory
and compact OEM ophthalmic and medical applications requiring high reliability.
The corona preionized laser is available in two standard air cooled models, a
300Hz and a 600Hz version, other repetition rate versions are also available.
The highly stable (<+/-2%) energy output specifications range from 12-35mJ
depending upon the choice wavelength and energy output can be monitored and
controlled with the internal energy detector and stability module, standard on
all lasers. The 600Hz version has a maximum output power of 12W with KrF at
248nm. The EX10 is a small, portable, lightweight, universal power input, self
contained PC compatible laser with on board vacuum pump and halogen filter. The
EX10 laser models features very long optics and gas lifetime with up to 30
million pulses per fill on KrF, and a static gas lifetime of up to 12 weeks with
ArF and KrF,
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EX50 Excimer laser

The EX50 laser system is a moderate output
power, high repetition rate laser available in, 250 Hz and 500 Hz maximum
repetition rate air cooled models and 750Hz and 1000 Hz water cooled units. A
maximum energy of 50mJ is obtained with KrF. The 500 Hz unit produces 20W with
KrF. The maximum output power specification of the 1000 Hz laser is 34W with KrF
at 248nm. The high repetition rate EX50 is a high reliability laser for
laboratory and industrial machining applications requiring moderate power and
high repetition rate. All lasers feature on board vacuum pumps, internal energy
detector and power stability module, PC compatibility and continuous operation
at maximum repetition rate. The laser of course features static gas lifetimes of
up to 12 weeks with KrF and dynamic gas lifetimes of greater than 30 million
pulses per fill with KrF.
A narrowband version of the EX50 laser is available, the
EX50LN gives narrow spectral output with linewidths of less than 1pm using ArF
and KrF. Output energies up to 6mJ ArF and 10mJ Krf are available at repetition
rates up to 1000Hz.
EX100 Excimer laser
The unique linear design
of GAM excimer products allows for power scaling at low incremental cost. The
EX100 laser system provides up to 100mJ per pulse and up to 68W output power in
a low cost compact package. The EX100 is available in 250, and 500 Hz maximum repetition rate water cooled units and a 125Hz air cooled unit.
The EX100 is a high energy, high power laser. All lasers feature on board vacuum
pumps, PC compatibility and continuous operation at maximum repetition rate. The
EX100 offers industrial enhancements for longer gas lifetime, reduced
maintenance and low cost of ownership.
EX200
LASER SYSTEM
High
Energy Excimer Laser : The EX200 is available in two air
cooled versions, 60Hz and 125Hz. The EX200 provides up to 200mJ at
248nm and 125mJ at 193nm. This laser is perfect for applications
such as
Pulsed Laser deposition. The self contained PC compatible lasers
include internal vacuum pumps and Halogen filters.
157nm F2 lasers
The EX10F, EX50F and
EX100F lasers are optimized for 157nm Fluorine vacuum VUV operation. The lasers
provide the longest specified static and dynamic gas lifetimes of any
commercially available 157nm lasers, with 15 days and 10 million pulses. Output
energy up to 10mJ is available with 8W average power at 157nm. The EX10F is
available in 350 and 700Hz models and the EX50F in a number of models up to
1000Hz. The lasers feature on board vacuum pumps and Halogen filters for rapid,
reliable gas exchange and include a kwik connect vacuum adapter. The PC
compatible lasers also operate on standard excimer wavelengths.
Line narrowed lasers
Free running excimer lasers with a stable
resonator produce a spectral output with a relatively wide bandwidth. For
example free running ArF has a bandwidth of approximately 500pm FWHM. The
spectral output can be greatly narrowed by inserting wavelength dispersive
optical elements into the laser cavity . The narrow band output can also be
tuned over a region which is typically close to the free running bandwidth of
the laser. The EX50LN produces narrow linewidths of less than 1pm with both KrF
and ArF. Narrow band excimer lasers exhibit exceptional temporal coherence
properties. The EX50LN gives up to 7cm coherence length at 248nm with very high
pointing stability for FBG applications.
Excimer Laser optics
High quality Calcium Fluoride optics with
tested coatings for the deep ultraviolet.
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